K-MAC ST5030-SL Thin Film Thickness Measurement System

K-MAC ST5030-SL Thin Film Thickness Measurement System

kmac 5030

Standard Model

Industrial Specifications

Automatic X - Y Stage

Auto Focusing

For Semiconductor & FPD

Fast Measurement & Easy Operation

Non-contact & Non-destructive

Superb Repeatability & Reproducibility

2D/3D Mapping & Contouring

Automatic Stage Control & Anti-vibration Table

CCD Camera

Auto Focusing

Stage Size: ~300mm x 300mm

Measurement Range: 100Å~ 35µm (Depends on Film Type)

Spot size: 40µm / 20µm, 4µm (Option)

Measurement Speed: 1~2 sec./site (Fitting time)

Application Areas: All Capability of ST2000 & More Precision Measurement

Intended for Large Size Wafer Measurement

Option: Reference Sample (K-MAC or KRISS or NIST)

Revolving Nosepiece: Quintuple Revolving Nosepiecs

Focus: Coaxial Coarse and Fine Focus Controls

Incident Illumination: 12v 100W Halogen Lamp

Dimensions: 500 x 750 x 650 mm

Weight: 80Kg

Type: Automatic

Measurement Method: Non-contact

Measurement Principle: Reflectometer